Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653735 | CVD silicon carbide layer as a BARC and hard mask for gate patterning | Chih-Yuh Yang, Pei-Yuan Gao, Lu You | 2003-11-25 |
| 6555397 | Dry isotropic removal of inorganic anti-reflective coating after poly gate etching | Matthew A. Purdy, James H. Hussey, Jr. | 2003-04-29 |
| 6365481 | Isotropic resistor protect etch to aid in residue removal | Matthew A. Purdy | 2002-04-02 |
| 6309947 | Method of manufacturing a semiconductor device with improved isolation region to active region topography | Basab Bandyopadhyay | 2001-10-30 |
| 6245581 | Method and apparatus for control of critical dimension using feedback etch control | Anthony J. Toprac, Matthew A. Purdy, John R. Behnke, James H. Hussey, Jr. | 2001-06-12 |
| 6165906 | Semiconductor topography employing a shallow trench isolation structure with an improved trench edge | Basab Bandyopadhyay, Michael J. McBride | 2000-12-26 |
| 5883625 | Arrangement system for object placement on windows | Chris Crawford | 1999-03-16 |
| 5504328 | Endpoint detection utilizing ultraviolet mass spectrometry | — | 1996-04-02 |