Issued Patents All Time
Showing 76–100 of 101 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976987 | In-situ corner rounding during oxide etch for improved plug fill | Ian Robert Harvey, Subhas Bothra | 1999-11-02 |
| 5965941 | Use of dummy underlayers for improvement in removal rate consistency during chemical mechanical polishing | Milind Weling, Subhas Bothra | 1999-10-12 |
| 5939765 | Sidewall profile | Jie Zheng, Suzanne Monsees | 1999-08-17 |
| 5939791 | Electrically conductive interconnects for integrated circuits | Teresa Trowbridge | 1999-08-17 |
| 5882982 | Trench isolation method | Jie Zheng, Suzanne Monsees | 1999-03-16 |
| 5861342 | Optimized structures for dummy fill mask design | Milind Weling | 1999-01-19 |
| 5821163 | Method for achieving accurate SOG etchback selectivity | Ian Robert Harvey | 1998-10-13 |
| 5804502 | Tungsten plugs for integrated circuits and methods for making same | Dipankar Pramanik, Xi-Wei Lin | 1998-09-08 |
| 5776821 | Method for forming a reduced width gate electrode | Jacob D. Haskell, Satyendra Sethi | 1998-07-07 |
| 5753561 | Method for making shallow trench isolation structure having rounded corners | Henry Lee, Jie Zheng | 1998-05-19 |
| 5730834 | Fluorine residue removal after tungsten etchback | — | 1998-03-24 |
| 5702978 | Sloped silicon nitride etch for smoother field oxide edge | Olivier Laparra | 1997-12-30 |
| 5639697 | Dummy underlayers for improvement in removal rate consistency during chemical mechanical polishing | Milind Weling, Subhas Bothra | 1997-06-17 |
| 5638006 | Method and apparatus for wafer level prediction of thin oxide reliability using differentially sized gate-like antennae | Subhash R. Nariani | 1997-06-10 |
| 5548224 | Method and apparatus for wafer level prediction of thin oxide reliability | Subhash R. Nariani | 1996-08-20 |
| 5522957 | Method for leak detection in etching chambers | Milind Weling, Vivek Jain, Dipankar Pramanik | 1996-06-04 |
| 5462892 | Semiconductor processing method for preventing corrosion of metal film connections | — | 1995-10-31 |
| 5420796 | Method of inspecting planarity of wafer surface after etchback step in integrated circuit fabrication | Milind Weling | 1995-05-30 |
| 5405488 | System and method for plasma etching endpoint detection | Dimitrios Dimitrelis, Samuel V. Dunton | 1995-04-11 |
| 5397433 | Method and apparatus for patterning a metal layer | — | 1995-03-14 |
| 5328865 | Method for making cusp-free anti-fuse structures | William J. Boardman, David P. Chan, Kuang-Yeh Chang, Vivek Jain, Subhash R. Nariani | 1994-07-12 |
| 5294295 | Method for moisture sealing integrated circuits using silicon nitride spacer protection of oxide passivation edges | — | 1994-03-15 |
| 5290734 | Method for making anti-fuse structures | William J. Boardman, David P. Chan, Kuang-Yeh Chang, Vivek Jain, Subhash R. Nariani | 1994-03-01 |
| 5198072 | Method and apparatus for detecting imminent end-point when etching dielectric layers in a plasma etch system | — | 1993-03-30 |
| 5120679 | Anti-fuse structures and methods for making same | William J. Boardman, David P. Chan, Kuang-Yeh Chang, Vivek Jain, Subhash R. Nariani | 1992-06-09 |