Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642529 | Methods for the automated testing of reticle feature geometries | Sudhir Subramanya, Clifford Takemoto | 2003-11-04 |
| 6433854 | Method of illumination uniformity in photolithographic systems | Daniel C. Baker, Kouros Ghandehari | 2002-08-13 |
| 6411367 | Modified optics for imaging of lens limited subresolution features | Daniel C. Baker, Subhas Bothra | 2002-06-25 |
| 6372522 | Use of optimized film stacks for increasing absorption for laser repair of fuse links | Milind Weling, Subhas Bothra | 2002-04-16 |
| 6313542 | Method and apparatus for detecting edges under an opaque layer | Dipankar Pramanik, Kouros Ghandehari, Daniel C. Baker | 2001-11-06 |
| 6297170 | Sacrificial multilayer anti-reflective coating for mos gate formation | Calvin T. Gabriel, Jacob D. Haskell | 2001-10-02 |
| 6262795 | Apparatus and method for the improvement of illumination uniformity in photolithographic systems | Daniel C. Baker, Kouros Ghandehari | 2001-07-17 |
| 6215129 | Via alignment, etch completion, and critical dimension measurement method and structure | Ian Robert Harvey | 2001-04-10 |
| 6162650 | Via alignment, etch completion, and critical dimension measurement method and structure | Ian Robert Harvey | 2000-12-19 |
| 5952135 | Method for alignment using multiple wavelengths of light | Kouros Ghandehari, Daniel C. Baker | 1999-09-14 |
| 5883011 | Method of removing an inorganic antireflective coating from a semiconductor substrate | Xi-Wei Lin, Henry Lee | 1999-03-16 |
| 5852497 | Method and apparatus for detecting edges under an opaque layer | Dipankar Pramanik, Kouros Ghandehari, Daniel C. Baker | 1998-12-22 |
| 5776821 | Method for forming a reduced width gate electrode | Jacob D. Haskell, Calvin T. Gabriel | 1998-07-07 |
| 5443941 | Plasma polymer antireflective coating | Anand J. Bariya, Kevin Brown | 1995-08-22 |