Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818064 | Photoresist dispense arrangement by compensation for substrate reflectivity | — | 2004-11-16 |
| 6433854 | Method of illumination uniformity in photolithographic systems | Kouros Ghandehari, Satyendra Sethi | 2002-08-13 |
| 6411367 | Modified optics for imaging of lens limited subresolution features | Subhas Bothra, Satyendra Sethi | 2002-06-25 |
| 6319735 | Photoresist dispense method by compensation for substrate reflectivity | — | 2001-11-20 |
| 6313542 | Method and apparatus for detecting edges under an opaque layer | Dipankar Pramanik, Kouros Ghandehari, Satyendra Sethi | 2001-11-06 |
| 6274940 | Semiconductor wafer, a chemical-mechanical alignment mark, and an apparatus for improving alignment for metal masking in conjunction with oxide and tungsten CMP | Charles Franklin Drill, Milind Weling | 2001-08-14 |
| 6262795 | Apparatus and method for the improvement of illumination uniformity in photolithographic systems | Kouros Ghandehari, Satyendra Sethi | 2001-07-17 |
| 6162586 | Method for substantially preventing footings in chemically amplified deep ultra violet photoresist layers | Samit Sengupta, Subhas Bothra | 2000-12-19 |
| 5952135 | Method for alignment using multiple wavelengths of light | Kouros Ghandehari, Satyendra Sethi | 1999-09-14 |
| 5952241 | Method and apparatus for improving alignment for metal masking in conjuction with oxide and tungsten CMP | Charles Franklin Drill, Milind Weling | 1999-09-14 |
| 5852497 | Method and apparatus for detecting edges under an opaque layer | Dipankar Pramanik, Kouros Ghandehari, Satyendra Sethi | 1998-12-22 |