Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170196 | Methods and systems for cleaning high aspect ratio structures | Errol Antonio C. Sanchez | 2024-12-17 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2024-10-22 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 12015042 | Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement | Papo CHEN, Errol Antonio C. Sanchez, John Boland, Zhiyuan Ye, Lori D. Washington +3 more | 2024-06-18 |
| 11996307 | Semiconductor processing tool platform configuration with reduced footprint | Nir Merry, Sushant S. Koshti, Michael Kuchar, Nyi O. Myo, Songjae Lee | 2024-05-28 |
| 11946135 | Low temperature deposition of iridium containing films | Feng Q. Liu, Hua Chung, Mei Chang, Jeffrey W. Anthis, David Thompson | 2024-04-02 |