Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170213 | Flat pocket susceptor design with improved heat transfer | Zhepeng CONG | 2024-12-17 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 12077880 | In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing | Zhepeng CONG, Tao SHENG, Yong-Ping Zheng | 2024-09-03 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 11996307 | Semiconductor processing tool platform configuration with reduced footprint | Nir Merry, Schubert S. Chu, Sushant S. Koshti, Michael Kuchar, Songjae Lee | 2024-05-28 |