Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170213 | Flat pocket susceptor design with improved heat transfer | Nyi O. Myo | 2024-12-17 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12077880 | In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing | Nyi O. Myo, Tao SHENG, Yong-Ping Zheng | 2024-09-03 |
| 11948818 | Temperature calibration with deposition and etch process | Tao SHENG, Vinh N. TRAN | 2024-04-02 |