Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077880 | In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing | Zhepeng CONG, Nyi O. Myo, Yong-Ping Zheng | 2024-09-03 |
| 11948818 | Temperature calibration with deposition and etch process | Zhepeng CONG, Vinh N. TRAN | 2024-04-02 |