Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851751 | Deposition system and method | Hsuan-Chih Chu, Yen-Yu Chen | 2023-12-26 |
| 11823964 | Deposition system and method | Yen-Yu Chen, Yi-Ming Dai | 2023-11-21 |
| 11762280 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Keith Kuang-Kuo Koai | 2023-09-19 |
| 11742231 | Movable wafer holder for film deposition chamber having six degrees of freedom | Hsuan-Chih Chu, Yen-Yu Chen, Yi-Ming Dai | 2023-08-29 |
| 11728226 | Deposition system and method | Hsuan-Chih Chu, Yen-Yu Chen, Yi-Ming Dai | 2023-08-15 |
| 11693327 | Apparatus and a method of forming a particle shield | — | 2023-07-04 |
| 11688615 | System and method for heating semiconductor wafers | Hsuan-Chih Chu, Yen-Yu Chen | 2023-06-27 |
| 11682639 | Semiconductor device and method of forming the same | Yen-Yu Chen, Chih-Wei Lin, Yi-Ming Dai | 2023-06-20 |
| 11681851 | Hierarchical density uniformization for semiconductor feature surface planarization | Venkata Sripathi Sasanka Pratapa, Jyun-Hong Chen | 2023-06-20 |
| 11669957 | Semiconductor wafer measurement method and system | Peng Chen, Yi-An Huang, Jyun-Hong Chen, Wei-Chung Hu, Shiang-Bau Wang +1 more | 2023-06-06 |
| 11600505 | Systems and methods for systematic physical failure analysis (PFA) fault localization | Peng Chen, Jyun-Hong Chen, Chien-Hui Chen | 2023-03-07 |
| 11574837 | Robot blade having multiple sensors for multiple different alignment tasks | Yen-Yu Chen | 2023-02-07 |