Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762280 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Wen-Hao Cheng | 2023-09-19 |
| 11699574 | Aluminum apparatus with aluminum oxide layer and method for forming the same | Ru-Chien Chiu, Bing Chen | 2023-07-11 |