Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762280 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Keith Kuang-Kuo Koai, Wen-Hao Cheng | 2023-09-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762280 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Keith Kuang-Kuo Koai, Wen-Hao Cheng | 2023-09-19 |