Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823964 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2023-11-21 |
| 11742231 | Movable wafer holder for film deposition chamber having six degrees of freedom | Hsuan-Chih Chu, Wen-Hao Cheng, Yen-Yu Chen | 2023-08-29 |
| 11732379 | Treatment system and method | Zong-Kun LIN, Hsuan-Chih Chu, Chien-Hsun Pan, Yen-Yu Chen | 2023-08-22 |
| 11728226 | Deposition system and method | Wen-Hao Cheng, Hsuan-Chih Chu, Yen-Yu Chen | 2023-08-15 |
| 11682639 | Semiconductor device and method of forming the same | Wen-Hao Cheng, Yen-Yu Chen, Chih-Wei Lin | 2023-06-20 |