Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851751 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2023-12-26 |
| 11742231 | Movable wafer holder for film deposition chamber having six degrees of freedom | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2023-08-29 |
| 11732379 | Treatment system and method | Zong-Kun LIN, Chien-Hsun Pan, Yen-Yu Chen, Yi-Ming Dai | 2023-08-22 |
| 11728226 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2023-08-15 |
| 11688615 | System and method for heating semiconductor wafers | Wen-Hao Cheng, Yen-Yu Chen | 2023-06-27 |
| 11635400 | Gas sensor | Hsiao-Wen Zan, Hsin-Fei Meng, Chien-Lung Wang, Sheng-Fu Horng, Wei-Lun Chen +2 more | 2023-04-25 |