Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854795 | Integrate rinse module in hybrid bonding platform | Xin-Hua Huang, Ping-Yin Liu, Hsun-Chung Kuang, Yuan-Chih Hsieh, Lan-Lin Chao +2 more | 2023-12-26 |
| 11827513 | Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same | Kuei-Sung Chang, Tai-Bang An, Chun-Wen Cheng | 2023-11-28 |
| 11812664 | Pizoelectric MEMS device with electrodes having low surface roughness | Yi-Ren Wang, Yuan-Chih Hsieh | 2023-11-07 |
| 11634318 | MEMs using outgassing material to adjust the pressure level in a cavity | Yuan-Chih Hsieh | 2023-04-25 |