Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827513 | Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same | Tai-Bang An, Chun-Wen Cheng, Hung-Hua Lin | 2023-11-28 |
| 11814283 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Chun-Wen Cheng, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh, Yi-Ren Wang | 2023-11-14 |
| 11736037 | MEMS structure and method of forming same | Yi Heng Tsai, Chia-Hua Chu | 2023-08-22 |
| 11713242 | MEMS device with dummy-area utilization for pressure enhancement | Chun-Wen Cheng, Fei-Lung Lai, Shang-Ying Tsai | 2023-08-01 |
| 11661333 | Semiconductor structure and manufacturing method thereof | Wei-Jhih Mao, Shang-Ying Tsai, Chun-Wen Cheng | 2023-05-30 |
| 11591211 | Semiconductive structure and manufacturing method thereof | Yen-Cheng Liu, Cheng-Yu Hsieh, Shang-Ying Tsai | 2023-02-28 |
| 11542151 | MEMS apparatus with anti-stiction layer | Fei-Lung Lai, Shang-Ying Tsai, Cheng-Yu Hsieh | 2023-01-03 |