Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827513 | Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same | Kuei-Sung Chang, Tai-Bang An, Hung-Hua Lin | 2023-11-28 |
| 11814283 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh, Yi-Ren Wang | 2023-11-14 |
| 11807521 | Support structure for MEMS device with particle filter | Chia-Hua Chu, Wen Cheng Kuo | 2023-11-07 |
| 11768170 | Biochip having a channel | Yi-Shao Liu, Chun-Ren Cheng | 2023-09-26 |
| 11750980 | MEMS device with enhanced membrane structure and method of forming the same | Chun-Yin Tsai, Chia-Hua Chu | 2023-09-05 |
| 11713242 | MEMS device with dummy-area utilization for pressure enhancement | Fei-Lung Lai, Kuei-Sung Chang, Shang-Ying Tsai | 2023-08-01 |
| 11703475 | Method of using integrated electro-microfluidic probe card | Yi-Shao Liu, Fei-Lung Lai, Chun-Ren Cheng | 2023-07-18 |
| 11678133 | Structure for integrated microphone | Jung-Huei Peng, Chia-Hua Chu, Chin-Yi Cho, Li-Min Hung, Yao-Te Huang | 2023-06-13 |
| 11667517 | Method and structure for CMOS-MEMS thin film encapsulation | Yu-Chia Liu, Chia-Hua Chu | 2023-06-06 |
| 11661333 | Semiconductor structure and manufacturing method thereof | Wei-Jhih Mao, Shang-Ying Tsai, Kuei-Sung Chang | 2023-05-30 |
| 11649162 | Particle filter for MEMS device | Chia-Hua Chu, Wen Cheng Kuo | 2023-05-16 |
| 11577954 | Method for forming semiconductor device | Chen-Hsiung Yang, Chia-Hua Chu, En-Chan Chen | 2023-02-14 |
| 11581476 | Semiconductor structure and method for manufacturing thereof | Chun-Yin Tsai, Chia-Hua Chu | 2023-02-14 |