Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814283 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh | 2023-11-14 |
| 11812664 | Pizoelectric MEMS device with electrodes having low surface roughness | Hung-Hua Lin, Yuan-Chih Hsieh | 2023-11-07 |
| 11697588 | Structure for microelectromechanical systems (MEMS) devices to control pressure at high temperature | Shing-Chyang Pan, Yuan-Chih Hsieh | 2023-07-11 |