Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814283 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Shing-Chyang Pan, Yuan-Chih Hsieh, Yi-Ren Wang | 2023-11-14 |
| 11713242 | MEMS device with dummy-area utilization for pressure enhancement | Chun-Wen Cheng, Kuei-Sung Chang, Shang-Ying Tsai | 2023-08-01 |
| 11703475 | Method of using integrated electro-microfluidic probe card | Yi-Shao Liu, Chun-Ren Cheng, Chun-Wen Cheng | 2023-07-18 |
| 11542151 | MEMS apparatus with anti-stiction layer | Kuei-Sung Chang, Shang-Ying Tsai, Cheng-Yu Hsieh | 2023-01-03 |