Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850704 | Methods to clean chemical mechanical polishing systems | Chih-Chieh Chang, Yen-Ting Chen, Kei-Wei Chen | 2023-12-26 |
| 11854872 | Semiconductor device structure with interconnect structure and method for forming the same | Chun-Hao Kung, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2023-12-26 |
| 11854827 | Magnetic slurry for highly efficiency CMP | Yen-Ting Chen, Chun-Hao Kung, Tung-Kai Chen, Kei-Wei Chen | 2023-12-26 |
| 11712778 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Kei-Wei Chen | 2023-08-01 |
| 11664213 | Bevel edge removal methods, tools, and systems | Jeng-Chi Lin, Pin-Chuan Su, Chien-Ming Wang, Kei-Wei Chen | 2023-05-30 |
| 11590627 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Kei-Wei Chen | 2023-02-28 |
| 11551936 | Self-healing polishing pad | Chun-Hao Kung, Kei-Wei Chen, Yen-Ting Chen | 2023-01-10 |