Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854827 | Magnetic slurry for highly efficiency CMP | Yen-Ting Chen, Tung-Kai Chen, Hui-Chi Huang, Kei-Wei Chen | 2023-12-26 |
| 11854872 | Semiconductor device structure with interconnect structure and method for forming the same | Chih-Chieh Chang, Kao-Feng Liao, Hui-Chi Huang, Kei-Wei Chen | 2023-12-26 |
| 11590627 | Mega-sonic vibration assisted chemical mechanical planarization | Shang-Yu Wang, Ching-Hsiang Tsai, Hui-Chi Huang, Kei-Wei Chen | 2023-02-28 |
| 11551936 | Self-healing polishing pad | Hui-Chi Huang, Kei-Wei Chen, Yen-Ting Chen | 2023-01-10 |