Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11590627 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Hui-Chi Huang, Kei-Wei Chen | 2023-02-28 |
CT
Ching-Hsiang Tsai
Overall (2023): #483,764 of 537,848Top 90%
1
Patents 2023