Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11712778 | Chemical mechanical planarization tool | Tung-Kai Chen, Wan-Chun Pan, Zink Wei, Hui-Chi Huang, Kei-Wei Chen | 2023-08-01 |
| 11590627 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Ching-Hsiang Tsai, Hui-Chi Huang, Kei-Wei Chen | 2023-02-28 |