Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854827 | Magnetic slurry for highly efficiency CMP | Yen-Ting Chen, Chun-Hao Kung, Hui-Chi Huang, Kei-Wei Chen | 2023-12-26 |
| 11712778 | Chemical mechanical planarization tool | Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Hui-Chi Huang, Kei-Wei Chen | 2023-08-01 |