Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842917 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Douglas R. McAllister +3 more | 2023-12-12 |
| 11735401 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Lei Lian | 2023-08-22 |
| 11721569 | Method and apparatus for determining a position of a ring within a process kit | Andrew Myles, Andreas Schmid, Phillip Criminale | 2023-08-08 |
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, David Ullstrom | 2023-04-04 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Yogananda Sarode Vishwanath, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-01-31 |