Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789371 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas | 2023-10-17 |
| 11734490 | Method for determining curvilinear patterns for patterning device | Quan Zhang, Been-Der Chen, Jing Su, Yi Zou, Yen-Wen Lu | 2023-08-22 |
| 11614690 | Methods of tuning process models | Mu FENG, Mir Farrokh SHAYEGAN SALEK, Dianwen ZHU, Leiwu ZHENG, Jen-Shiang Wang | 2023-03-28 |
| 11586114 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Christoph Hennerkes, Zhan Shi, Xiaoyang Li, Frank Staals | 2023-02-21 |
| 11580289 | Method for determining patterning device pattern based on manufacturability | Roshni Biswas, Cuiping Zhang, Ningning Jia, Jingjing Liu, Quan Zhang | 2023-02-14 |