Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789371 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Rafael C. Howell | 2023-10-17 |
| 11580289 | Method for determining patterning device pattern based on manufacturability | Rafael C. Howell, Cuiping Zhang, Ningning Jia, Jingjing Liu, Quan Zhang | 2023-02-14 |