Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789371 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Peng Liu, Rafael C. Howell, Roshni Biswas | 2023-10-17 |
| 11768440 | Training methods for machine learning assisted optical proximity error correction | Jing Su, Ya Luo | 2023-09-26 |
| 11734490 | Method for determining curvilinear patterns for patterning device | Quan Zhang, Been-Der Chen, Rafael C. Howell, Jing Su, Yi Zou | 2023-08-22 |
| 11561477 | Training methods for machine learning assisted optical proximity error correction | Jing Su, Ya Luo | 2023-01-24 |