Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675274 | Etch bias characterization and method of using the same | Yongfa Fan, Mu FENG, Qian Zhao, Jen-Shiang Wang | 2023-06-13 |
| 11614690 | Methods of tuning process models | Mu FENG, Mir Farrokh SHAYEGAN SALEK, Dianwen ZHU, Rafael C. Howell, Jen-Shiang Wang | 2023-03-28 |