Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675274 | Etch bias characterization and method of using the same | Yongfa Fan, Leiwu ZHENG, Mu FENG, Qian Zhao | 2023-06-13 |
| 11614690 | Methods of tuning process models | Mu FENG, Mir Farrokh SHAYEGAN SALEK, Dianwen ZHU, Leiwu ZHENG, Rafael C. Howell | 2023-03-28 |
| 11580274 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Martin Ebert +5 more | 2023-02-14 |
| 11567413 | Method for determining stochastic variation of printed patterns | Chang An Wang, Alvin Wang, Jiao LIANG, Mu FENG | 2023-01-31 |