Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675274 | Etch bias characterization and method of using the same | Yongfa Fan, Leiwu ZHENG, Qian Zhao, Jen-Shiang Wang | 2023-06-13 |
| 11614690 | Methods of tuning process models | Mir Farrokh SHAYEGAN SALEK, Dianwen ZHU, Leiwu ZHENG, Rafael C. Howell, Jen-Shiang Wang | 2023-03-28 |
| 11567413 | Method for determining stochastic variation of printed patterns | Chang An Wang, Alvin Wang, Jiao LIANG, Jen-Shiang Wang | 2023-01-31 |