Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768442 | Method of determining control parameters of a device manufacturing process | Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Abraham SLACHTER +3 more | 2023-09-26 |
| 11733610 | Method and system to monitor a process apparatus | Wim Tjibbo Tel, Mark John Maslow, Paul Christiaan Hinnen | 2023-08-22 |
| 11733615 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Christoph Hennerkes | 2023-08-22 |
| 11586114 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Christoph Hennerkes, Rafael C. Howell, Zhan Shi, Xiaoyang Li | 2023-02-21 |