Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822255 | Process window based on defect probability | Abraham SLACHTER, Stefan Hunsche, Anton Bernhard Van Oosten, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more | 2023-11-21 |
| 11768442 | Method of determining control parameters of a device manufacturing process | Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Abraham SLACHTER, Roy ANUNCIADO +3 more | 2023-09-26 |
| 11733610 | Method and system to monitor a process apparatus | Mark John Maslow, Frank Staals, Paul Christiaan Hinnen | 2023-08-22 |
| 11709432 | Method to characterize post-processing data in terms of individual contributions from processing stations | Ekaterina Mikhailovna Viatkina, Tom Van Hemert | 2023-07-25 |
| 11681229 | Selection of measurement locations for patterning processes | Hans Van Der Laan, Marinus Jochemsen, Stefan Hunsche | 2023-06-20 |
| 11646174 | Method for calibrating a scanning charged particle microscope | Hermanus Adrianus DILLEN, Willem Louis VAN MIERLO | 2023-05-09 |
| 11635698 | Computational metrology based sampling scheme | Yichen Zhang, Sarathi ROY | 2023-04-25 |
| 11599027 | Lithographic process and apparatus and inspection process and apparatus | Hans Erik KATTOUW, Valerio ALTINI, Bearrach Moest | 2023-03-07 |