Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768442 | Method of determining control parameters of a device manufacturing process | Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Abraham SLACHTER +3 more | 2023-09-26 |
| 11579535 | Method of determining the contribution of a processing apparatus to a substrate parameter | — | 2023-02-14 |