Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784098 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2023-10-10 |
| 11733610 | Method and system to monitor a process apparatus | Wim Tjibbo Tel, Mark John Maslow, Frank Staals | 2023-08-22 |
| 11728224 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2023-08-15 |
| 11710668 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +5 more | 2023-07-25 |
| 11604419 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Jean-Pierre Agnes Henricus Marie Vaessen, Nicolas Mauricio Weiss +3 more | 2023-03-14 |