Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846889 | Method and apparatus for diffraction pattern guided source mask optimization | Dezheng SUN | 2023-12-19 |
| 11815808 | Method for high numerical aperture thru-slit source mask optimization | Kars Zeger Troost, Eelco Van Setten | 2023-11-14 |
| 11747739 | Method and apparatus for imaging using narrowed bandwidth | Willard E. Conley, Joshua Jon Thornes | 2023-09-05 |
| 11681849 | Method for optimizing a patterning device pattern | Xiaoyang Li | 2023-06-20 |
| 11586114 | Wavefront optimization for tuning scanner based on performance matching | Christoph Hennerkes, Rafael C. Howell, Zhan Shi, Xiaoyang Li, Frank Staals | 2023-02-21 |