Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815808 | Method for high numerical aperture thru-slit source mask optimization | Eelco Van Setten, Duan-Fu Stephen Hsu | 2023-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815808 | Method for high numerical aperture thru-slit source mask optimization | Eelco Van Setten, Duan-Fu Stephen Hsu | 2023-11-14 |