Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733615 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals | 2023-08-22 |
| 11586114 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Rafael C. Howell, Zhan Shi, Xiaoyang Li, Frank Staals | 2023-02-21 |