Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Liran Yerushalmi +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Liran Yerushalmi +2 more | 2023-03-14 |
| 11556738 | System and method for determining target feature focus in image-based overlay metrology | Etay Lavert, Amnon Manassen, Yossi Simon, Avner Safrani | 2023-01-17 |