Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Andrew V. Hill, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2023-12-26 |
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Yuval Lubashevsky, Itay Gdor, Eitan Hajaj | 2023-10-24 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Vladimir Levinski +9 more | 2023-02-28 |
| 11573497 | System and method for measuring misregistration of semiconductor device wafers utilizing induced topography | Amnon Manassen, Gilad Laredo | 2023-02-07 |