Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848229 | Selective blocking of metal surfaces using bifunctional self-assembled monolayers | Michael L. McSwiney, Mark Saly, Drew Phillips, Aaron Dangerfield, David Thompson +2 more | 2023-12-19 |
| 11823893 | Methods of depositing SiCON with C, O, and N compositional control | Mark Saly, David Thompson, Thomas Knisley | 2023-11-21 |
| 11821085 | Methods of selective atomic layer deposition | Mark Saly, David Thompson, Tobin Kaufman-Osborn, Kurt Fredrickson, Thomas Knisley +1 more | 2023-11-21 |
| 11760768 | Molybdenum(0) precursors for deposition of molybdenum films | Chandan Kr Barik, John Sudijono, Chandan Das, Doreen Wei Ying Yong, Mark Saly +1 more | 2023-09-19 |
| 11756785 | Molecular layer deposition contact landing protection for 3D NAND | Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick | 2023-09-12 |
| 11732356 | Multilayer encapsulation stacks by atomic layer deposition | Cong Trinh, Mihaela Balseanu, Maribel Maldonado-Garcia, Ning Li, Mark Saly +2 more | 2023-08-22 |
| 11702733 | Methods for depositing blocking layers on conductive surfaces | Lakmal C. Kalutarage, Aaron Dangerfield, Feng Q. Liu, Mark Saly, Michael Haverty +1 more | 2023-07-18 |
| 11658025 | Chalcogen precursors for deposition of silicon nitride | Chandan Kr Barik, Michael Haverty, Muthukumar Kaliappan, Cong Trinh, John Sudijono +3 more | 2023-05-23 |
| 11621172 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Madhur Sachan, Regina Freed | 2023-04-04 |
| 11621161 | Selective deposition of a passivation film on a metal surface | Yong Wang, Andrea Leoncini, Doreen Wei Ying Yong, John Sudijono | 2023-04-04 |
| 11562904 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2023-01-24 |
| 11549181 | Methods for atomic layer deposition of SiCO(N) using halogenated silylamides | Mark Saly | 2023-01-10 |
| 11545354 | Molecular layer deposition method and system | Zeqing Shen, Bo Qi, Abhijit Basu Mallick, Xinke Wang, Mark Saly | 2023-01-03 |