Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821070 | Ruthenium film deposition using low valent metal precursors | Nasrin Kazem, Jeffrey W. Anthis, Michael Haverty | 2023-11-21 |
| 11702733 | Methods for depositing blocking layers on conductive surfaces | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Aaron Dangerfield, Feng Q. Liu, Mark Saly +1 more | 2023-07-18 |
| 11658025 | Chalcogen precursors for deposition of silicon nitride | Chandan Kr Barik, Michael Haverty, Cong Trinh, Bhaskar Jyoti Bhuyan, John Sudijono +3 more | 2023-05-23 |