Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538668 | Mounting stage, substrate processing device, and edge ring | Kyo Tsuboi, Tomoya Kato, Shoichiro Matsuyama | 2022-12-27 |
| 11538715 | Stage and substrate processing apparatus | Ryo CHIBA, Akira Nagayama | 2022-12-27 |
| 11521886 | Substrate processing apparatus and substrate support | Taketoshi TOMIOKA, Hiroki Kishi, Jisoo SUH | 2022-12-06 |
| 11437223 | Stage and plasma processing apparatus | Tsuguto Sugawara, Shin Yamaguchi, Hajime Tamura | 2022-09-06 |
| 11417500 | Plasma processing apparatus and plasma processing method | Junichi Sasaki, Hidetoshi Hanaoka, Tomohiko Akiyama | 2022-08-16 |