Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538668 | Mounting stage, substrate processing device, and edge ring | Yasuharu Sasaki, Kyo Tsuboi, Tomoya Kato | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538668 | Mounting stage, substrate processing device, and edge ring | Yasuharu Sasaki, Kyo Tsuboi, Tomoya Kato | 2022-12-27 |