Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521886 | Substrate processing apparatus and substrate support | Yasuharu Sasaki, Taketoshi TOMIOKA, Hiroki Kishi | 2022-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521886 | Substrate processing apparatus and substrate support | Yasuharu Sasaki, Taketoshi TOMIOKA, Hiroki Kishi | 2022-12-06 |