Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476095 | Electrostatic chuck and plasma processing apparatus | Akiyoshi Mitsumori | 2022-10-18 |
| 11437223 | Stage and plasma processing apparatus | Yasuharu Sasaki, Tsuguto Sugawara, Hajime Tamura | 2022-09-06 |
| 11404251 | Processing apparatus for processing target object | Akiyoshi Mitsumori, Takehiko Arita, Koichi Murakami | 2022-08-02 |
| 11236420 | Cleaning method | Akiyoshi Mitsumori | 2022-02-01 |