Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404251 | Processing apparatus for processing target object | Shin Yamaguchi, Akiyoshi Mitsumori, Koichi Murakami | 2022-08-02 |
| 11237577 | Temperature control system including multiple valves and temperature control method | Kei Kobayashi | 2022-02-01 |