Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476095 | Electrostatic chuck and plasma processing apparatus | Shin Yamaguchi | 2022-10-18 |
| 11404251 | Processing apparatus for processing target object | Shin Yamaguchi, Takehiko Arita, Koichi Murakami | 2022-08-02 |
| 11236420 | Cleaning method | Shin Yamaguchi | 2022-02-01 |