TS

Tsuguto Sugawara

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
📍 Rifu, JP: #134 of 319 inventorsTop 45%
Overall (2022): #223,798 of 548,613Top 45%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11437223 Stage and plasma processing apparatus Yasuharu Sasaki, Shin Yamaguchi, Hajime Tamura 2022-09-06