Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450538 | Substrate stage, substrate processing apparatus, and temperature control method | — | 2022-09-20 |
| 11437223 | Stage and plasma processing apparatus | Yasuharu Sasaki, Tsuguto Sugawara, Shin Yamaguchi | 2022-09-06 |
| 11429703 | Authentication device, authentication system, authentication method, and program | Kazuki Maeno, Hiroaki Yoshio, Yasunobu Ogura | 2022-08-30 |