TA

Tomohiko Akiyama

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #229,440 of 548,613Top 45%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11417500 Plasma processing apparatus and plasma processing method Junichi Sasaki, Yasuharu Sasaki, Hidetoshi Hanaoka 2022-08-16